Shape | Height | Tip Set Back | Radius | Tip Angles |
---|---|---|---|---|
OPUS | 14 µm | 0 | < 30 nm* | 0° front, 35° back, <9° side |
Cantilever | Shape | Length | Width | Thickness | Force Const. | Res. Freq. |
---|---|---|---|---|---|---|
A Contact mode cantilever | Beam | 500 µm(490 - 510 µm)* | 30 µm(28 - 32 µm)* | 3 µm(2.5 - 3.5 µm)* | 0.3 N/m(0.1 - 0.6 N/m)* | 17 kHz(11 - 22 kHz)* |
B Standard tapping mode cantilever | Beam | 175 µm(165 - 185 µm)* | 40 µm(38 - 42 µm)* | 3 µm(2.5 - 3.5 µm)* | 9 N/m(2.8 - 21 N/m)* | 150 kHz(100 - 200 kHz)* |
C Soft tapping mode cantilever | Beam | 240 µm(230 - 250 µm)* | 30 µm(28 - 32 µm)* | 3 µm(2.5 - 3.5 µm)* | 2.5 N/m(0.75 - 5.3 N/m)* | 75 µm(50 - 100 µm)* |
70 nm Au on both sides of the cantilever