Shape | Height | Tip Set Back | Radius | Tip Angles |
---|---|---|---|---|
OPUS | 14 µm | 0 µm | < 30 nm* | 0° front, 35° back, <9° side |
Cantilever | Shape | Length | Width | Thickness | Force Const. | Res. Freq. |
---|---|---|---|---|---|---|
A Contact mode cantilever | Beam | 500 µm(485 - 515 µm)* | 30 µm(28 - 32 µm)* | 3 µm(2.5 - 3.5 µm)* | 0.3 N/m(0.1 - 0.6 N/m)* | 17 kHz(11 - 22 kHz)* |
B Soft AC mode cantilever | Beam | 240 µm(225 - 255 µm)* | 30 µm(28 - 32 µm)* | 3 µm(2.5 - 3.5 µm)* | 2.5 N/m(0.75 - 5.3 N/m)* | 75 kHz(50 - 100 kHz)* |
C Standard AC mode cantilever | Beam | 175 µm(160 - 190 µm)* | 40 µm(38 - 42 µm)* | 3 µm(2.5 - 3.5 µm)* | 9 N/m(2.8 - 21 N/m)* | 150 µm(100 - 200 µm)* |
D High frequency AC mode cantilever | Beam | 65 µm(50 - 80 µm)* | 31 µm(29 - 33 µm)* | 3 µm(2.5 - 3.5 µm)* | 100 N/m(35 - 215 N/m)* | 1200 kHz(650 - 1850 kHz)* |
70 nm Au on both sides of the cantilevers
The 4XC series features four different cantilevers for various measurement modes, two on each side of the holder chip: